Dresden 2017 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 41: Nanostructures at Surfaces: Metals, Oxides and Semiconductors II

O 41.6: Vortrag

Dienstag, 21. März 2017, 15:15–15:30, REC/PHY C213

The diffuse scattering pattern from nanostructured surfaces — •Victor Soltwisch1, Analia Fernandez Herrero1, Mika Pflüger1, Jürgen Probst2, Anton Haase1, and Frank Scholze11Physikalisch-Technische Bundesanstalt — 2Helmholtz-Zentrum Berlin

Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. To support an improved reconstruction of nanostructured surface geometries, we investigated the origin of the contributions to the diffuse scattering pattern which is correlated to the surface roughness. Resonant diffuse scattering leads to a palm-like structure of intensity sheets. Dynamic scattering generates the so-called Yoneda band caused by a resonant scatter enhancement at the critical angle of total reflection and higher-order Yoneda bands originating from a subsequent diffraction of the Yoneda enhanced scattering at the grating. Our explanations are supported by modelling using a solver for the time-harmonic Maxwell's equations based on the finite-element method.

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