Dresden 2017 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 41: Nanostructures at Surfaces: Metals, Oxides and Semiconductors II

O 41.7: Vortrag

Dienstag, 21. März 2017, 15:30–15:45, REC/PHY C213

Flux- and Fluence-dependent Nanocone-formation on InP under ion-irradiation — •Detlef Kramczynski1, 2 and Hubert Gnaser11AG Grenzflächen/Nanomaterialien/Biophysik, Uni Kaiserslautern — 2Nanoparticle Process Technology, Uni Duisburg-Essen

Samples of InP-wafers have been irradiated with 2.1 keV Ar-ions at various combinations of flux (0.9 to 1.6 · 1014 ions/(cm2 s)) and fluence (0.4 to 2.4 · 1018 ions/(cm2)), at vertical incidence and at room temperature.

The result is a rich phase-diagram wherein the size-distribution of the Nanocones, their global-scale surface-coverage and their local-scale tendency to agglomerate as islands very delicately depend on the proper combination of flux and fluence.

The suggested explanation is a multi-species adatom-diffusion-process, with thermally-enhanced adatom-diffusion being responsible for the global-scale phenomena and the energy-deposition of the ions being responsible for the local-scale phenomena.

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