Dresden 2017 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 52: Nanostructures at Surfaces: Dots, Particles, Clusters
O 52.8: Poster
Dienstag, 21. März 2017, 18:30–20:30, P1C
Nanoparticle Adhesion on Flat Surfaces - an AFM Lateral Force Study — •Clara Wanjura1, Daniel Geiger1, Michaela Schmid1, Irina Schrezenmeier1, Matthias Roos2, and Othmar Marti1 — 1Institute of Experimental Physics, Ulm University, Albert-Einstein-Allee 11, 89081 Ulm, Germany — 2Carl Zeiss SMT GmbH, Rudolf-Eber-Strasse 2, 73447 Oberkochen, Germany
Understanding how nanoparticles adhere to surfaces is relevant, since in many applications, as for example in photolithography, such nanoparticles can already cause defects. In other settings, the adhesion of nanoparticles might be desirable. In all of these cases, it is important to understand how strongly particles stick to the surface and how to influence that interaction.
The lateral force needed to move nanoparticles with an AFM tip is sampled at discrete points in time over several weeks for probes stored in different environments to understand the aging process of silicon surfaces decorated by nanoparticles. As well as an increase in lateral force in certain environments, the formation of layers of a hard material, possibly silicon oxide, around the particles is shown. In addition, the height of these layers is examined with an AFM and compared to a published model for the growth of silicon oxide layers through oxidation, the Deal-Groves model [1].
[1] General Relationship for the Thermal Oxidation of Silicon, Deal, B. E. and Grove, A. S., Journal of Applied Physics, 36, 3770-3778 (1965), DOI:http://dx.doi.org/10.1063/1.1713945