Dresden 2017 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 64: Scanning Probe Techniques: Method development

O 64.13: Poster

Dienstag, 21. März 2017, 18:30–20:30, P2-OG3

Low Vibration Laboratory with a Single-Stage Vibration Isolation for Microscopy ApplicationsBert Voigtländer1,2, Peter Coenen1,2, Vasily Cherepanov1,2, •Peter Borgens1,2, Thomas Duden3, and F. Stefan Tautz1,21Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany — 2Jülich Aachen Research Alliance (JARA) Fundamentals of Future Information Technology, 52425 Jülich, Germany — 3Konstruktionsbüro Duden, Borgsenallee 35, 33649 Bielefeld, Germany

Vibrational isolation and electromagnetic shielding are crucial for every high-precision scanning probe microscope. In many cases, multi-stage vibration isolation stages are used, which add considerably to the complexity (and cost) of a SPM system. For this reason, recent approaches tend towards single-stage vibrational systems which can provide similar results while requiring much lower expenditure.

In this contribution, we report on the construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest on a 200 ton solid base plate. Careful optimization of the air spring system results in a vibration level of the laboratory floor well below the one induced by acceleration of 10ng for most frequencies. Additional accoustic and electromagnetic isolation is accomplished by a room-in-room concept.

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