Mainz 2017 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 20: Nano-Optics II
Q 20.6: Vortrag
Dienstag, 7. März 2017, 12:15–12:30, P 11
Three-dimensional XUV Coherence Tomography with nanometer resolution using a supercontinuum HHG source — •Jan Nathanael1,2, Silvio Fuchs1,2, Martin Wünsche1,2, Johann Jakob Abel1, Julius Reinhard1, Stefan Aull1, Max Möller1,2, Christian Rödel1,3, and Gerhard G Paulus1,2 — 1IOQ, Friedrich-Schiller-University Jena, Germany — 2Helmholtz Institute Jena, Germany — 3SLAC Nat. Accelerator Laboratory, USA
We report on recent achievements in the development of XUV Coherence Tomography (XCT), which is based upon the principle of OCT. XCT is a method to resolve multilayer samples at nanometer resolution in axial direction and was proven at synchrotron radiation sources [1]. A suitable lab-scaled XUV source for XCT is a table-top femtosecond laser in combination with a tunable optical parametric amplifier (OPA) as a driver for high-harmonic generation (HHG) due to its spectral broadness. With slightly varying the fundamental frequencies the resulting harmonic combs are shifted. By averaging over these spectra within a few seconds a continuous XUV spectrum is generated in the range of 30 to 200 eV [2]. With this XUV source that features a photon flux up to 3×108 photons per eV’s XCT can provide non-destructive volumetric three-dimensional measurements with a resolution of about 30 nm axially and 20 micrometer laterally on a lab-scaled HHG setup. Moreover, layers with thicknesses even lower than the achieved axial resolution of XCT can be revealed qualitatively. [1] S. Fuchs et al., Scientific Reports 6, 20658 (2016) [2] M. Wünsche et al., Optics Express, submitted (2016)