Mainz 2017 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 31: Poster: Quantum Optics and Photonics I
Q 31.70: Poster
Dienstag, 7. März 2017, 17:00–19:00, P OG1+2
Nanofabrication of Optimized Diamond Scanning Probe — •Michel Challier1, Richard Nelz1, Philipp Fuchs1, Julia Purtov2,3, Ettore Bernardi1, Selda Sonusen1, René Hensel3, and Elke Neu1 — 1Universität des Saarlandes, Fakultät NT - Fachrichtung Physik, Campus E2.6, 66123 Saarbrücken — 2Universität des Saarlandes, Fakultät NT - Fachrichtung Materialwissenschaft und Werkstofftechnik, Campus E1.3, 66123 Saarbrücken — 3INM - Insititut für neue Materialien GmbH, Campus D2.2, 66123 Saarbrücken
Nitrogen vacancy (NV) color centers in diamond represent highly-coherent, atomic-sized spin systems with optical spin read-out and photostable fluorescence. To harness their full potential as magnetic and near field sensors, single NVs have to be incorporated into nanophotonic structures. We focus on fabricating scanable single crystalline diamond nanowires on thin (<1 µ m) platforms generating probes with high spatial resolution and NV fluorescence. Using numerical methods, we optimized the pillar shapes. Thin membranes, platforms and pillars are created using inductively coupled plasma reactive ion etching, direct laser writing lithography and electron beam lithography. We optimize all process steps in comparison to previous work [1].
[1] Patrick Appel, Elke Neu, Marc Ganzhorn, Arne Barfuss, Marietta Batzer, Micha Gratz, Andreas Tschöpe and Patrick Maletinsky, Rev. Sci. Instrum. 87, 063703 (2016)