Mainz 2017 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 44: Photonics II
Q 44.6: Vortrag
Donnerstag, 9. März 2017, 12:15–12:30, P 11
Automated aberration compensation in high numerical aperture systems for arbitrary laser modes — •Julian Hering1, Erik H. Waller1, and Georg von Freymann1,2 — 1Physics department and state research center OPTIMAS, University of Kaiserslautern, 67663 Kaiserslautern, Germany — 2Fraunhofer Institute for Physical Measurement Techniques (IPM), 67663 Kaiserslautern, Germany
In three-dimensional laser lithography, controlling the point-spread-function (PSF) is crucial for fabricating structures with highest resolution and minimal feature sizes. Aberrations present within most optical systems have to be physically compensated prior to the writing process.
Here, we report on a modified Gerchberg-Saxton algorithm (GSA) for spatial-light-modulator (SLM) based automated aberration compensation for arbitrary laser modes like, e.g., doughnut, bottlebeam, and multi-foci modes in a high numerical aperture system. First-guess initial amplitude and phase conditions of the pupil function and circularly polarized light allow for a non-vectorial phase retrieval of the distorted PSF and thus, its shape optimization. Our approach outperforms recent algorithms considering vectorial corrections.
Besides direct laser writing also applications like stimulated emission depletion based microscopy or optical tweezer arrays might benefit from the presented method.