Berlin 2018 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 19: Lithography I: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Morning Session (joint session DS/KFM)
DS 19.7: Vortrag
Mittwoch, 14. März 2018, 12:15–12:30, H 2032
Mechanical Properties of 3D Nano-Architectures Fabricated via Focused Electron Beam Induced Deposition — Johannes Froech1,2, Juergen Sattelkow1,2, Robert Winkler1,2, Christian Schwalb3, Ernest Fantner3, and •Harald Plank1,2 — 1Institute for Electron Microscopy and Nanoanalysis Graz University of Technology, 8010 Graz, Austria — 2Graz Centre for Electron Microscopy, 8010 Graz, Austria — 3GETec Microscopy Inc. & SCL Sensor.Tech. Fabrication Inc., 1220 Vienna, Austria
With the recent introduction of controlled 3D nano-printing via focused electron beam induced deposition, an entirely new range of applications such as nano-optics, -mechanics, or -electronics comes within reach whose fabrication is extremely challenging or even impossible with alternative techniques. In this contribution, we focus on mechanical properties of freestanding, Pt based 3D nano-architectures for atomic force microscopy (AFM) based application as high-resolution thermal nano-probes. A combined approach of finite element simulation, AFM based force spectroscopy and real-time imaging via scanning electron microscopy is used to identify and compensate highly unwanted peculiarities. In more detail, we discuss an unexpectedly strong influence of non-straight side branches as well as the consequences of fabrication mismatches on the lowest nanoscale, leading to non-linear mechanical behaviour and morphological twisting, respectively. The combined outcome of our findings demonstrate the high demands on nanoscale accuracy during 3D nano-printing to exploit the full potential in terms of predictable mechanical properties.