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DPG

Berlin 2018 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 19: Lithography I: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Morning Session (joint session DS/KFM)

DS 19.7: Vortrag

Mittwoch, 14. März 2018, 12:15–12:30, H 2032

Mechanical Properties of 3D Nano-Architectures Fabricated via Focused Electron Beam Induced DepositionJohannes Froech1,2, Juergen Sattelkow1,2, Robert Winkler1,2, Christian Schwalb3, Ernest Fantner3, and •Harald Plank1,21Institute for Electron Microscopy and Nanoanalysis Graz University of Technology, 8010 Graz, Austria — 2Graz Centre for Electron Microscopy, 8010 Graz, Austria — 3GETec Microscopy Inc. & SCL Sensor.Tech. Fabrication Inc., 1220 Vienna, Austria

With the recent introduction of controlled 3D nano-printing via focused electron beam induced deposition, an entirely new range of applications such as nano-optics, -mechanics, or -electronics comes within reach whose fabrication is extremely challenging or even impossible with alternative techniques. In this contribution, we focus on mechanical properties of freestanding, Pt based 3D nano-architectures for atomic force microscopy (AFM) based application as high-resolution thermal nano-probes. A combined approach of finite element simulation, AFM based force spectroscopy and real-time imaging via scanning electron microscopy is used to identify and compensate highly unwanted peculiarities. In more detail, we discuss an unexpectedly strong influence of non-straight side branches as well as the consequences of fabrication mismatches on the lowest nanoscale, leading to non-linear mechanical behaviour and morphological twisting, respectively. The combined outcome of our findings demonstrate the high demands on nanoscale accuracy during 3D nano-printing to exploit the full potential in terms of predictable mechanical properties.

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