Berlin 2018 – wissenschaftliches Programm
DS 19: Lithography I: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Morning Session (joint session DS/KFM)
DS 19.8: Vortrag
Mittwoch, 14. März 2018, 12:30–12:45, H 2032
Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever — •Juergen Sattelkkow1,2, Johannes Froech1,2, Robert Winkler1,2, Christian Schwalb3, Ernest Fantner3, Vlado Stavrov4, and Harald Plank1,2 — 1Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Graz, Austria — 2Graz Centre for Electron Microscopy, Graz, Austria — 3GETec Microscopy Inc. & SCL Sensor.Tech. Fabrication Inc., Vienna, Austria — 4AMGT, Botevgrad, Bulgaria
Atomic Force Microscopy (AFM) has evolved into an essential part in research and development due to its quantitative 3D surface characterization capabilities on the spatial nanoscale together with the possibility to access laterally resolved magnetic, chemical, mechanical, optical, electric or thermal properties of the sample surface. In this contribution, we demonstrate the direct-write fabrication of 3D nano-probes via focused electron beam induced deposition (FEBID) together with its respective AFM application. For conductive-AFM, Pt-C nano-pillars are initially fabricated by FEBID and then chemically transferred into pure Pt via gas assisted post-growth purification. For thermal nano-probes we use platinums temperature dependent, electric properties as transducing element together with FEBIDs 3D fabrication capabilities to realize free-standing nano-bridges. We demonstrate the reversible, quantitative temperature response together with fast response times of less than 30 ms/K. Finally, we show scanning thermal microscopy measurements, revealing thermal surface gradients on the nanoscale.