Berlin 2018 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 31: Poster Session II
DS 31.18: Poster
Donnerstag, 15. März 2018, 11:15–13:15, Poster F
Rf magnetron sputtering of solid electrolytes for battery applications — •Fabian Michel1, Martin Becker1, Jaroslava Obel2, Martin Finsterbusch3, Jürgen Janek4, and Angelika Polity1 — 1Institute for Exp. Physics I and Center for Material Research (ZfM/LaMa), Justus-Liebig-Universität, 35392 Gießen — 2Departement Chemie, Ludwig-Maximilian-Universität, 81377 München — 3Forschungszentrum Jülich GmbH, 52428 Jülich — 4Institute of Physical Chemistry and Center for Material Research (ZfM/LaMa), Justus-Liebig-Universität, 35392 Gießen
Lithium based solid electrolyte thin films were produced via rf magnetron sputtering. An optimization of the physical properties, which are important for battery applications, was done by varying the deposition parameters. Consequently compositions of the films were investigated using different techniques like X-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP-OES) and Rutherford backscattering spectrometry (RBS). To evaluate the samples conductivity investigations were performed by electrochemical impedance spectroscopy (EIS). A maximum increase in ionic conductivity was sought after as was to gain knowledge about the influence of the different elements and sputtering parameters of the solid electrolyte with respect to the ionic conductivity. To monitor the improvements made, results were compared with earlier findings of investigations on solid electrolytes.