Berlin 2018 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 50: HL Poster IV
HL 50.42: Poster
Donnerstag, 15. März 2018, 19:00–21:00, Poster B
Optical and structural properties of PLD-grown TiN single layers and TiN/MgO superlattices on MgO(100) substrates — •Florian Jung1, Santana Ellis1, Chris Sturm1, Rüdiger Schmidt-Grund1, Michael Lorenz1, Marius Grundmann1, Christian Patzig2, Susanne Selle2, and Thomas Höche2 — 1Universität Leipzig, Felix-Bloch-Institut für Festkörperphysik, Leipzig, Germany — 2Fraunhofer IMWS, CAM, Halle, Germany
For TiN/MgO-superlattices with single layer thickness of some nanometers, a hyperbolic dispersion in the NIR and visible spectral range is predicted[1]. These structures are promosing for a variety of applications, such as hyperlenses[2]. However, the growth of high-quality superlattices is challenging due to the combined in situ growth of an oxide and a nitride material. We investigate the optical properties of the TiN/MgO-superlattices by ellipsometry. We found that the miscut of the substrate has a strong impact on the dielectric function of the first layer pair and is negligible for subsequent layers. As expected, the plasma frequency of TiN was found to be in the visible spectral range. Structural properties were determined using RHEED, x-ray- and TEM-techniques. The analysis shows that smooth TiN/MgO-interfaces, a homogeneous layer density, as well as a low strain gradient and low mosaicity of the films were achieved[3].
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