Berlin 2018 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 47: Poster Session II

MM 47.34: Poster

Mittwoch, 14. März 2018, 18:30–19:45, Poster C

A new instrument for cryo atom probe tomography — •Jonas Ott, Patrick Stender, and Guido Schmitz — Institut für Materialwissenschaft, Lehrstuhl für Materialphysik, Stuttgart, Deutschland

Atom probe tomography (APT) as well as dual beam microscopy (FIB/SEM) are powerful tools in nanotechnology with enormous scientific output. The combination of both techniques is able to deliver information up to sub-nanometer resolution of many material classes. However, sometimes the application becomes limited by the spatial separation of the two techniques. To enable the analysis of liquids and soft matter by atom probe tomography, we designed and installed a new hybrid instrument which represents a combination of a dual beam scanning microscope for FIB preparation and miniaturized APT chamber. The dual beam tool is extended by all facilities to enable cryo-preparation. The central piece of the new microscope is the APT-shuttle containing sample stage, cryo connection to reach 20 K, a piezo drive that controls the 20 *m extraction electrode and 20 kV voltage supply and insulation. Containing all these features, this shuttle is nevertheless not larger than 4x7 cm2 and can be transferred within seconds from one stage to the other. This approach enables several new possibilities with regard to measurement procedure and sample preparation. Furthermore, we could demonstrate unique APT measurements of frozen liquids and organic materials. On this poster the design and the working principle of the new tool are demonstrated. We also present calibration results in different measurement modes as achieved by the new tool.