Berlin 2018 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 49: Poster: Nanostructures on Surfaces I
O 49.22: Poster
Dienstag, 13. März 2018, 18:15–20:30, Poster A
Nanosecond laser-induced periodic surface structures on fused silica dependent on additional confinement layer stacks — Martin Ehrhardt1,2, •Pierre Lorenz2, Shengying Lai2, Frank Frost2, Bing Han1, and Klaus Zimmer2 — 1Advanced Launching Co-innovation Center, Nanjing University of Science and Technology, 200 XiaoLingWei, 210094 Nanjing, Jiangsu, China — 2Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig, Germany
Laser-induced periodic surface structures (LIPSS) are generated in semiconductor, polymer, metal and dielectric surfaces irradiated with short and ultra-short laser pulses. LIPSS generation with nanosecond laser pulses shows a dependency of the periodicity and the ripple orientation on the wavelength as well as the polarization of the laser beam. In the present study, LIPSS formation on fused silica surfaces covered by a layer stack system was studied. The layer stack system consist, start from the fused silica surface, of a polymer or semiconductor interface layer, a metal absorber layer and a photoresist confinement layer. The resultant LIPPS structures were analyzed by atomic force (AFM) and scanning electron microscopy (SEM). It was found that the LIPSS periodicity and height is dependent on the thickness and the material properties of the layers.