Berlin 2018 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 1: Vacuum Physics

VA 1.1: Hauptvortrag

Montag, 12. März 2018, 09:00–09:45, A 060

Ion Pump design for improved pumping speed at low pressure — •Mauro Audi — Agilent Technologies Via F.lli Varian 54 10040 Leini (Torino)

Even if Ion pumps are widely and mostly used in UHV conditions, virtually every existing Ion Pump has its maximum pumping speed around 10 E-6 mbar. The discharge intensity in the Ion Pump Penning cell (the number of ions that bombard the cathode per unit time) is pressure dependent, and it is the main parameter that influences the pumping speed. A study has been performed to evaluate the influence of magnetic fields and cell dimensions on the Ion Pump Discharge Intensity at different pressure. As a result, a combination of parameters that allows to design and build an Ion Pump with the maximum pumping speed shifted towards lower pressures has been obtained. Experimental results with several different experimental set ups are presented which lead to a new 200 L/S Ion Pump with its maximum pumping speed in the 10E-8 mbar range.