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Erlangen 2018 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 13: Low Pressure Plasmas - Poster

P 13.12: Poster

Dienstag, 6. März 2018, 16:15–18:15, Redoutensaal

Structural Characterization of VOx deposited by Plasma Ion Assisted Electron Beam Evaporation for Energy Storage Application — •Miguel Dias1, Anna Frank2, Stefan Hieke2, Simon Fleischmann3,4, Jens Harhausen1, Rüdiger Foest1, Volker Presser3,4, Christina Scheu2,5, and Angela Kruth11INP Greifswald, Germany — 2MPIE Düsseldorf, Germany — 3INM Saarbrücken, Germany — 4Dept. of Mat. Sci. and Eng., Saarland University, Germany — 5Materials Analytics, RWTH Aachen University, Germany

Vanadium oxide-based materials are of interest for electrochemical energy storage applications but controlled synthesis at large scale is still challenging. Electron beam evaporation assisted by plasma ions was performed to synthesize VOx thin layers on Si and CNT. Plasma properties such as ion velocity distributions were obtained for different O2 content of the working gas, substrate temperature, applied discharge voltage and current. Structural analysis of thin film properties was carried out by means of XRD and Raman spectroscopy as well as HR-TEM in combination with EELS. First correlation between plasma parameters and resulting structural properties were established indicating a strong dependence of the crystallinity on the ion energy and chamber temperature. VOx was deposited directly on free-standing CNT to obtain hybrid electrode materials that combine redox activity with high electrical conductivity. First electrochemical characterizations show promising activities and potential for their usage as electrodes for their use as electrodes in lithium-ion batteries.

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