Erlangen 2018 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 13: Low Pressure Plasmas - Poster

P 13.3: Poster

Dienstag, 6. März 2018, 16:15–18:15, Redoutensaal

Diagnostics on a hollow cathode glow discharge by means of a retarding field analyser and a calorimetric probe — •Lisa Anna-Maria Bauer, Fabian Haase, Sven Gauter, and Holger Kersten — Institute of Experimental and Applied Physics (IEAP), Kiel University, Germany

In this work a cylindrical DC hollow cathode glow discharge is combined with an axially directed magnetic field in order to increase the plasma density. By rising the magnetic field strength the efficiency of the so called hollow cathode effect can be enhanced. A retarding field analyser and a passive thermal probe are used to characterise positive ions, which impact the negative biased cathode. These ions are, for instance, responsible for sputter processes, especially, for deposition rate and homogeneity during thin film deposition. Therefore, it is important to determine their energy distribution and their energy input to the cathode surface. Varying parameters in this work are the cathode material, gas pressure, magnetic field strength, discharge mode (DC and HiPIMS) and the distance between the probes and the cathode surface.