Erlangen 2018 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 15: Helmholtz Graduate School IV - Plasma Wall Interaction
P 15.1: Vortrag
Mittwoch, 7. März 2018, 14:00–14:25, A 0.112
SIESTA: a new high-current ion source for angle-dependent sputter yield measurements — •Rodrigo Arredondo Parra1,2, Martin Oberkofler1, Thomas Schwarz-Selinger1, and Klaus Schmid1 — 1Max Planck Institut für Plasmaphysik, Boltzmannstr. 2, D-85748, Garching, Germany — 2Technische Universität München, Boltzmannstr. 15, D-85748, Garching, Germany
SIESTA (Second Ion Experiment for Sputtering and TDS Analysis) is a newly built high current ion source used for research on plasma-wall interaction issues. The ion source can be set to an acceleration potential of up to 15 kV and can be operated with H, D, He and Ar. The beam is mass-filtered in a magnetic sector field. A monoenergetic beam of a single species (e.g. D3+) is used for irradiation of samples in the separate implantation chamber at a base pressure of 10−8 mbar. The target can be rotated to study angle-dependent effects and can be positively biased to facilitate exposure to ion energies as low as 200 eV. A magnetic suspension balance allows for in-situ sputter-yield measurements. Particle flux densities of up to 3*1019 D/m2/s for 10 keV D3+ ions were measured. As part of ongoing research on the influence of surface roughness on the sputter yield, controlled roughness samples of Fe and W were exposed to a 6 kV D3+ ion beam (2 keV/D) under varying angles of incidence. The resulting sputter-yields are compared to Monte-Carlo simulations, agreeing on the dependence of the sputter-yield on the incidence angle and, in the case of Fe, also on the absolute amounts. The sputter-yields for W and Au are compared to literature data, agreeing well with previous measurements at normal incidence.