Erlangen 2018 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 53: Quantum Optics and Photonics III
Q 53.3: Vortrag
Donnerstag, 8. März 2018, 11:00–11:15, K 0.016
Shape fidelity of 3D printed microoptics — •Simon Ristok1, Simon Thiele2, Timo Gissibl3, Alois Herkommer2, and Harald Giessen1 — 14. Physikalisches Institut, Universität Stuttgart — 2Institut für technische Optik, Universität Stuttgart — 3Nanoscribe GmbH, Eggenstein-Leopoldshafen
Complex three dimensional structures on the micrometer scale can be fabricated by focusing a femtosecond laser at 780 nm into a UV sensitive photoresist. The photoresist is polymerized via two-photon absorption at 390 nm in a small volume element around the laser focus, resulting in sub-micrometer resolution. By moving the focus through the photoresist arbitrary shapes can be produced.
Particularly the high resolution renders this direct laser writing technique suitable for the fabrication of high quality optical elements on the micrometer scale. However, many of the used materials exhibit shrinkage after polymerization, leading to deviations from the optical design and therefore reducing the imaging quality.
In this work we focus on the compensation of the shrinking behavior in order to achieve high shape fidelity. Furthermore, we present applications such as aspheric microlens arrays on CMOS sensors.