München 2019 – wissenschaftliches Programm

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K: Fachverband Kurzzeit- und angewandte Laserphysik

K 6: Laser Applications I

K 6.5: Vortrag

Mittwoch, 20. März 2019, 12:20–12:40, HS 3

Self assembly laser-induced nanostructuring of dielectric surfaces A review — •P. Lorenz1, M. Klöppel2, J. Zajadazc1, I. Zagoranskiy1, M. Ehrhardt1, K. Zimmer1, B. Hopp3, and H. Bing41Leibniz-Institut für Oberflächenmodifizierung, Germany — 2Fraunhofer-Institut für Verkehrs- und Infrastruktursysteme IVI, Germany — 3Department of Optics and Quantum Electronics, University of Szeged, Hungary — 4Advanced Launching Co-innovation Center, Nanjing University of Science and Technology, China

Nanostructured surfaces exhibit an increased interest for industrial. The usages of laser processes which utilize self-organization processes allow a fast, flexible and large-scale structuring. The IPSM-LIFE (Laser Induced front Side Etching using in-situ prestructured metal layer) allows nanostructuring of dielectric surfaces and metal layer supported by a self-organizing melt-forming process of the metal layer. At the IPSM-LIFE, a metal layer on a surface was irradiated, the first laser treatment results in a melting of the metal layer and the surface tension tends to a nanostructuring of the metal surface. The second laser treatment, the laser treatment of the pre-structured metal layer result in an evaporation of the metal layer and partial of the dielectric surface and finally in a nanostructuring of the surface. The resultant metal layer and the dielectric surface structures are dependent on the metal layer as well as laser parameter. The method allows the production of randomly distributed and periodically arranged structures with a minimum lateral size of up to 10nm and an achievable pattern depth of up to 1μm with an achievable aspect ratio of 2.

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