München 2019 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 16: Low Pressure Plasmas II

P 16.1: Vortrag

Donnerstag, 21. März 2019, 11:00–11:25, HS 21

Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges — •Julian Held1, Ante Hecimovic2, Achim von Keudell1, and Volker Schulz-von der Gathen11Experimental Physics II, Ruhr University Bochum, Germany — 2Max Planck Institute for Plasma Physics, Garching, Germany

The velocity distribution function of titanium neutrals in the target region of a high power impulse magnetron sputtering discharge was investigated by optical emission spectroscopy. A high-resolution plane grating spectrograph combined with a fast, gated, intensified CCD camera was used to study the shape of selected optical emission lines. Doppler broadening and shift were analyzed to gain information about the velocity distribution of sputtered titanium neutrals. The velocity distribution function was found to depend on the discharge power for target power densities up to 0.6 kW cm−2. Above that value, the velocity distribution was constant. The collision processes of sputtered neutrals close to the target were described using a modified version of the Krook collisional operator. Using this interpretation, evidence for strong scattering of the titanium neutrals in the target region was found. This scattered population is found to be created from previously scattered ions by resonant charge exchange.

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