München 2019 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 16: Low Pressure Plasmas II

P 16.4: Vortrag

Donnerstag, 21. März 2019, 11:55–12:10, HS 21

Separated effects of plasma particle species during surface activation — •Beatrix Biskup1, Marc Böke1, Jan Benedikt2, and Achim von Keudell11Experimental Physics II - Reactive Plasmas, Ruhr-University Bochum, 44780 Bochum, Germany — 2Experimental Plasma Physics, Christian-Albrechts-University Kiel, Germany

A short plasma pre-treatment can improve the barrier effect of a-C:H /a-Si:H multilayers on polymer substrates, while a prolonged treatment can negatively influence the properties. In this work, we are investigating the influence of different plasma particle species, namely ions, metastables and (V)UV-photons, during the surface activation in an inductively coupled plasma.

To separate the different species, we build an ion-repelling grid system (IReGS), which repels ions from the substrate. In a second approach we further separate the effect of argon metastables from the effect of (V)UV-photons.

The change in surface energy of the polymer substrate is than analyzed by contact angle measurements at different activation times and particle composition to find an optimal activation process.

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