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P: Fachverband Plasmaphysik

P 16: Low Pressure Plasmas II

P 16.5: Talk

Thursday, March 21, 2019, 12:10–12:25, HS 21

Directionally resolved characterization of momentum transfer during sputter processes — •Mathis Klette, Thomas Trottenberg, Manuel Maas, and Holger Kersten — Institute of Experimental and Applied Physics (IEAP), Kiel University, Germany

In the past, the directional distributions of reflected and sputtered particles of a sputter plume have been investigated using various methods like mass spectrometry, optical emission spectroscopy, or quartz crystal microbalances. Some of these methods require a complex setup, while others can only detect certain species of particles or rely on secondary effects like deposition.

In this study, we present a characterization of sputter plumes using interferometric force probes [1]. In contrast to conventional diagnostics, these probes do not require a complex setup and they can measure the momentum flux of all charged and neutral species. In the experiment, an ion beam is focused on a rotatable sputter target. For different angles of incidence, a force probe rotating around the target characterizes the sputter plume. A second force probe determines the vector of the force acting on the sputter target. The angular ejection distributions are compared with simulated data based on the sputter code SRIM [2]. For the experiment, copper and silver targets and different noble gases were used. The energy of the impinging ions and the background gas pressure were varied to change the momentum transfer.

[1] Spethmann et al., 24(2017), 093501.

[2] J. Biersack et al., Nucl. Instrum. Methods 174, 257 (1980).