München 2019 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.12: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Control of size, crystallinity and structure of Si-nanoparticles synthesized in a capacitively coupled low-pressure plasma — •Oguz Han Asnaz1, Gesa Wieck2, Torben Dankwort2, and Jan Benedikt11Institute of Experimental and Applied Physics, Kiel University, Germany — 2Institute of Material Science, Kiel University, Germany

Non-thermal plasmas have proven themselves as a powerful system for the synthesis of crystalline nanoparticles. The high-energetic reactions possible in these plasmas provide the necessary heating to create nanoparticles of high purity and crystallinity. A capacitively coupled flow-through reactor is simple to set up while providing high production rates and good synthesis conditions. Using system parameters such as gas flow rate, plasma zone length, and RF power, it is a versatile system for the generation of nanocrystals with sharply defined characteristics.

This contribution explores controlling particle size, crystallinity and structure of the generated nanoparticles by modificating these system parameters and analyzing via a range of diagnostics from Raman Spectroscopy, over Fourier-transform infrared spectroscopy (FTIR), and transmission electron microscopy (TEM), to X-ray diffraction (XRD). These findings will lay the foundation for our next step, where the generated particles will be injected into a secondary plasma reactor for controlled surface treatment with continuous monitoring by means of IR absorption spectroscopy with a multi pass cell.

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