München 2019 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.121: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Atmospheric plasmas for generation of nanostructured materials — •Jan Benedikt1, Ove Hansen1, Oleksander Polonskyi1, Mohamed Mokhtar Hefny2, David Necas3, and Judith Golda11Kiel University, Germany — 2Ruhr-University Bochum, Germany — 3CEITEC and Masaryk University, Brno, Czech Republic

Cold atmospheric plasmas can generate high densities of reactive species or dissociate effectively precursor gases. Contrary to low-pressure plasmas, the collisions prevent ion bombardment and the diffusion is slow. On the other hand, energy can be effectively stored in form of excitation energy (metastable atoms, excimers, metastable molecules) and a convection can be used as an effective transport of reactive species in atmospheric plasma jets. However, the main application of atmospheric plasmas is mainly in surface treatment applications, they are not widely used in applications for thin film generation due to the limited quality of the deposited material, missing ion bombardment and localized treatment. The material synthesis is mainly demonstrated in proof of principle experiments. Here, we will discuss the transport of reactive species to the substrate and the effect of recombination reactions on the treatment efficiency. An important effect of highly collisional conditions is that even species with low surface reaction probability contribute very effectively to the surface reactions. Finally, we will report on the use of He/oxygen plasma for the generation of nanostructured copper oxide layers.

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