München 2019 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.125: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Sensing IEDFs and IADFs in radio-frequency discharges using a MEMS-based sensor stack — •Kerstin Roessel1, Birk Berger1, Thomas Mussenbrock1, Marcel Melzer2, Chris Stoeckel2, and Sven Zimmermann21Brandenburg University of Technology Cottbus-Senftenberg, 03046 Cottbus, Germany — 2Chemnitz University of Technology, 09111 Chemnitz, Germany

Ion energy distribution functions (IEDFs) and ion angular distribution functions (IADFs) are crucial parameters for materials processing using plasma discharges. This is particularly true when the physics of the plasma processes needs to be understood. Such a demand is important when plasma processing is intended to be knowledge-based, rather than based on trial and error. To reach this goal robust, non-perturbing, and reliable IEDF/IADF sensors are needed. In this contribution we propose a new IEDF/IADF sensor based on a MEMS (microelectromechanical systems) structure. We explain the working principle and show first experimental results. Finally, a profound analysis of the ion dynamics within the sensor based on kinetic simulation is provided.

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