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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.9: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Combination of retarding field analyzer and calorimetric probe for diagnostics of an ion beam source — •Felix Georg, Thomas Trottenberg, and Holger Kersten — IEAP, Christian-Albrechts-Universität zu Kiel, Germany

A recently developed plasma diagnostic, which combines a retarding field analyzer (RFA) and a passive thermal probe (PTP), has been used for the characterization of an ECR plasma ion source.

The PTP serves as the collector, in front of which three centrally aligned grids are operated as the retarding field system. In this setup the collector does not only measure the incoming ion current depending on the voltage applied to the grids of the RFA, but also the incoming energy flux density of the impinging ions or neutrals, respectively.

In this study the combined diagnostic is used in an ECR plasma ion source experiment. The ion energy distribution (IED) is determined regarding the energy exchange of the neutral background gas with the ion beam extracted from the plasma source.