Regensburg 2019 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 14: Poster
DS 14.24: Poster
Dienstag, 2. April 2019, 17:00–20:00, Poster E
External C-ERDA and RBS analysis setup — •Felix Junge1, Masahiro Saito1,3, Kim Holm1,2, Felipe Lipp Bregolin1, and Hans Hofsäss1 — 1II. Physikalisches Institut, Georg-August-Universität Göttingen, Göttingen Germany — 2Institut für Physik, Martin-Luther-Universität Halle-Wittenberg, Halle, Germany — 3Toray Research Center Inc., 3-3-7, Sonoyama, Otsu, Shiga 520-0842, Japan
In this work we describe the new construction of the external analysis setup at the University of Göttingen, which is used to perform Rutherford backscattering (RBS) simultaneously to coincidence elastic recoil detection analysis (C-ERDA) under atmospheric pressure. In addition, thin layers of titanium were deposited to a Si3N4 membrane and the RBS and C-ERDA spectra were recorded. Furthermore, polyamide and Mylar foils were measured as reference samples. The aim is to measure a depth profile of the hydrogen concentration in thin films and self supporting foils and thus to enable a quantitative elemental analysis of the light elements. Moreover, it is planned to load the titanium films with hydrogen and produce hydrogen containing amorphous carbon layers on Si3N4 membranes.