Regensburg 2019 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 19: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

DS 19.4: Vortrag

Mittwoch, 3. April 2019, 16:00–16:15, H32

Opening the Door to New Beam Induced Processing Applications: A Compact and Flexible Gas Injection System — •Andrew Jonathan Smith, Klaus Schock, Andreas Rummel, and Stephan Kleindiek — Kleindiek Nanotechnik, Aspenhaustr. 25, 72770 Reutlingen, Deutschland

A flexible GIS module that can be filled with precursor material by the user is introduced. This module is comprised of a small temperature controlled reservoir, a nozzle, and a motor that actuates a valve. Using a micromanipulator, it is possible to position the GIS nozzle precisely while being able to move it far away from the sample so that it is not an obstacle during other processing/imaging steps.

The reservoir can be loaded with solid or liquid precursor materials. It is also possible to feed gaseous precursors from a source outside of the microscope's vacuum chamber. The gas is then introduced using a precisely controllable needle valve.

This approach allows for a high degree of flexibility in choosing precursor materials. Switching precursors is as simple as exchanging the plug-in module on the MM3A-EM micromanipulator. Also, utilizing multiple GI-Systems for specialized tasks is made easy and cost effective.

Having a compact and flexible GIS that can be loaded with virtually any precursor ma- terial provides a multitude of possibilities for exploring novel solutions to existing problems as well as new applications for beam induced deposition processes.

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