Regensburg 2019 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 19: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

DS 19.5: Vortrag

Mittwoch, 3. April 2019, 16:15–16:30, H32

FXBID - an X-ray based sibling to FEBIP — •Andreas Späth1, Kim Thomann1, Florian Vollnhals1, Jörg Raabe2, Kevin C. Prince3, Robert Richter3, Wolfgang Hieringer4, Hubertus Marbach1, and Rainer H. Fink11Physikalische Chemie II, FAU Erlangen-Nürnberg, Germany — 2Swiss Light Source, Paul Scherrer Institut, Villigen, Switzerland — 3Elettra Sincrotrone, Basovizza, Italy — 4Theoretische Chemie, FAU Erlangen-Nürnberg, Germany

Focused X-ray beam induced deposition (FXBID) is a novel technique for the additive fabrication of metallic nanostructures by illuminating metal organic precursor molecules with focused soft X-rays in a Fresnel zone plate based scanning transmission X-ray microscope (STXM)[1,2]. An advantage of the technique is the possibility to optimize precursor fragmentation by proper selection of the incident photon energy. For a better understanding of basic X-ray induced fragmentation processes, we have performed photon energy dependent mass spectrometry and secondary electron spectroscopy studies for several metal organic precursors[3]. The results are correlated with TD-DFT calculations of the molecular orbitals relevant for soft X-ray absorption and have been transferred to advanced deposition experiments. We have started to explore the capabilities of in-situ cleaning procedures (reactive gases, annealing, etc.) to enhance the chemical purity of FXBID deposits. The project is funded by DFG grant SP 1775/1-1.

[1] A. Späth et al., RSC Advances, 2016, 6, 98344.

[2] F. Tu et al., J. Vac. Sci. Technol. B, 2017, 35(3), 031601.

[3] A. Späth et al., Microsc. Microanal. 2018, 24(S2), 114.

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