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DS: Fachverband Dünne Schichten

DS 19: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

DS 19.8: Vortrag

Mittwoch, 3. April 2019, 17:30–17:45, H32

Cisplatin as potential Pt FEBID precursor: NH3 ligands enhance the electron-induced removal of chlorine — •Markus Rohdenburg1, Kai Ahlenhoff1, Sascha Koch2, Armin Gölzhäuser2, and Petra Swiderek11Institute for Applied and Physical Chemistry, University of Bremen, Leobener Str. 5, 28359 Bremen, Germany — 2Department of Physics, University of Bielefeld, Universitätsstraße 25, 33615 Bielefeld, Germany

As recently shown, electron beam exposure to crystals of cisplatin (cis-Pt(NH3)2Cl2) leads to a violent reaction. The crystal literally boils with a deposit of pure Pt remaining behind [1]. We have proposed that this reaction is driven by the electron-induced fragmentation of the NH3 ligands which supplies hydrogen that converts chlorine ligands into HCl. In contrast, the structurally similar cis-Pt(CO)2Cl2 rapidly loses CO upon irradiation but yields deposits with high chlorine contents that can only be removed by extensive electron exposure [2]. We therefore present new results that confirm the formation of HCl by use of electron-stimulated desorption (ESD) experiments. Furthermore, XPS data reveals that electron irradiation removes N and Cl from cisplatin on a similar time scale. The exposure required for quantitative removal of Cl is much smaller in the case of cisplatin than for cis-Pt(CO)2Cl2 underlining the favourable effect of the NH3 ligands.

[1] J. Warneke et al., J. Phys. Chem. C 120 (2016) 4112.

[2] J.A. Spencer et al., J. Am. Chem. Soc. 138 (2016) 9172.

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