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DS: Fachverband Dünne Schichten

DS 25: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...) Part II

DS 25.11: Vortrag

Freitag, 5. April 2019, 12:15–12:30, H32

Structure evolution of hydrogenated TiO₂ by means of Perturbed Angular Correlation — •Dmitry Zyabkin¹, Juliana Schell^2,3, Ulrich Vetter¹, and Peter Schaaf¹ — ¹Chair materials for Electronics, Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano^®, Gustav-Kirchhoff-Str. 5, 98693 Ilmenau, Germany — ²European Organization for Nuclear Research (CERN), CH- 1211 Geneva, Switzerland — ³Institute for Materials Science and Center for Nanointegration Duisburg-Essen (CENIDE), University of Duisburg-Essen, 45141 Essen, Germany

Hydrogenated titania has been recently attracting plenty of attention due to its promising properties. Not quite long ago some results proved that H is able to create a bond with Ti via Ti-OH and stays connected up to 530-550 K when it starts to dissociate and leave, additionally V₀ start to rearrange. To study this phenomena we applied recent perturbed γγ-angular correlation (PAC) studies of TiO₂:H thin films using the probe ^111mCd, which was implanted at the online isotope separator ISOLDE at CERN. The films were produced by reactive magnetron sputtering on Si substrates. The subsequent H₂ plasma treatment was performed at various temperatures up to 663K. After implantation with 10¹¹ probe atoms the samples were transported to a PAC setup and measured in various atmospheres (O₂, air and vacuum) and in a range of temperatures to follow structure refinement. In order to preserve H-boundings no after implantation annealing was done. Time-differential R(t) spectra were fitted against electric quadrupole interaction parameter sets corresponding to fractions of probes.