Regensburg 2019 – wissenschaftliches Programm
KFM 14.27: Poster
Mittwoch, 3. April 2019, 16:00–18:30, Poster C
Zone-plate based soft X-ray microscopy with sub-10 nm resolution — Rainer H. Fink1,2, Joshua Loroña Ornelas1, •Andreas Späth1, Jörg Raabe3, Christian David3, and Benedikt Rösner3 — 1Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Germany — 2CENEM, Friedrich-Alexander Universität Erlangen-Nürnberg, Germany — 3Paul Scherrer Institut, Villigen, Switzerland
Soft X-ray scanning transmission microspectroscopy (STXM) using Fresnel zone plates (FZPs) as focusing elements has developed into a routine technique for the investigation of semi-transparent thin film specimens. Routine operation of STXMs uses spatial resolution of around 30 nm, determined by the outermost zone width of the FZP. An elegant method to fabricate high-resolution FZPs has been introduced by doubling the line density obtained from the lithography step utilizing atomic layer deposition (ALD). We have recently prepared FZPs with line structures to about 7 nm, thus pushing the resolution limits into the sub-10 nm regime. We will report on the resolution tests of specific test samples, but also on technologically relevant specimens where the improvement in lateral resolution becomes inevitable. Determination of the spatial resolution was conducted using a two-dimensional Fourier shell correlation of two independent data sets. This yielded a real space resolution of < 8 nm considering the half-bit criterion. The project achieved funding by the BMBF (project 05K16WED), within the EU-H2020 Research and Innovation Programme, No. 654360 NFFA-Europe, and by Marie Skłodowska-Curie grant No. 701647.