Regensburg 2019 – wissenschaftliches Programm
KFM 14.32: Poster
Mittwoch, 3. April 2019, 16:00–18:30, Poster C
Improved automatic proton beam writing — •Lukas Jäger, Alrik Stegmaier, and Hans Hofsäss — II. Physikalisches Institut, Georg-August-Universität Göttingen, Göttingen Germany
Proton beam writing is a maskless lithographic technique using a focused high energy proton beam to pattern materials and create high aspect-ratio 3D structures. At the II. Institute of the University Göttingen a tandem accelerator with a beam line for proton beam writing is available. To control the beams position on the sample, the sample-holder can be moved by two piezo stages. First the beam shape is measured via a PIXE measurement on a Ni-grid. The beam shape can be used by a program to compute the near optimal movement of the sample-holder during irradiation. Instead of rasterizing the desired pattern, the program optimizes the irradiation pattern to enable the irradiation of more complex patterns. Recent advances in the software development improved stability, fail safety and accuracy of the irradiation process, including a newly automatic blanking system.