Regensburg 2019 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 51: Magnetism Poster B
MA 51.45: Poster
Donnerstag, 4. April 2019, 15:00–18:00, Poster C
Optimization of a Fabrication Process for Metallic Nanoconstrictions for Spin-Hall nano-oscillators — •Stephanie Lake1, Philipp Dürrenfeld1, Frank Heyroth2, and Georg Schmidt1,2 — 1Institut für Physik, Martin-Luther-Universität Halle-Wittenberg, 06120 Halle, Germany — 2Interdisziplinäres Zentrum für Materialwissenschaften, Martin-Luther-Universität Halle-Wittenberg, 06120 Halle, Germany
Generating high frequency signals without a microwave source has been demonstrated using the spin-Hall Effect (SHE) in nano-oscillator devices.1 The SHE can drive pure spin currents into a ferromagnetic material exciting spin waves detected electrically with powers up to 10 pW.2 However, the efficiency of generating such signals significantly depends on device geometry. It is thus important to have excellent control of the nanoconstriction (NC) shape and dimensions.
In this poster, several parameters of the fabrication process are investigated to understand their effect on the dimensions and quality of Py-based NCs. The structures are made by first sputtering 5 nm of Py and 6 nm of Pt onto silicon. A positive bi-layer resist is patterned with sets of varied NC designs by e-beam lithography. Afterward, aluminum oxide is deposited and lifted off to serve as an etching mask for the metal stack. Variations of exposed pattern and exposure strategy during the e-beam lithography process result in different shapes and sizes of the NC structures and allow for future optimization.
1Vladislav E. Demidov et al. Nat. Materials 11, 1028-1031 (2012).
2A. A. Awad et al. Nat. Physics 13, 292-299 (2017).