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Regensburg 2019 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 20: Poster session II

MM 20.12: Poster

Dienstag, 2. April 2019, 18:30–20:00, Poster C

A new doping method for titanium oxide layers prepared by plasma electrolytic oxidation — •Wolfram Gilbert, Mhamed El Achhab, and Klaus Schierbaum — Heinrich-Heine-Universität Düsseldorf, Universitätsstraße 1, 40225 Düsseldorf, Germany

Controlled doping procedures in semiconducting metal oxides are of general interest for the fabrication of mixed systems with n-type and p-type crystallites [1]. Plasma Electrolytic Oxidation (PEO) is a versatile technique to create titanium oxide gas sensing layers of different anatase/rutile ratios and microstructures [2]. To extend the technique to doped systems (e.g. p-type conducting TiO2) we add chromium salts to the electrolyte during PEO and investigate the effect on the resulting phase composition and microstructure of the films.

For this purpose, oxide layers were formed on a 125 µm thick titanium foil under PEO conditions, using a 12.85 mol/l H2SO4 electrolyte, which was supplemented by Cr2(SO4)3. In the experiments, the Cr2(SO4)3 concentration of the electrolyte, electrostatic and potentiostatic components, voltage steps and maximum current strength were changed systematically. Size and morphology of the generated layers were measured in cross-section by SEM. Chromium in the sample was detected by EDX. The crystal structure was determined by XRD and Raman spectroscopy.

[1] Y. Li et al., Sensors and Actuators B: Chemical 83 (1-3), S. 160-163 (2002)

[2] M. El Achhab and K. Schierbaum, J. Sens. Sens. Syst. 5, 273 (2016)

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