Regensburg 2019 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 29: Nanostructures at Surfaces III: Dots, Particles, and Clusters

O 29.4: Vortrag

Dienstag, 2. April 2019, 11:15–11:30, H25

In-situ monitoring of nanoparticle generation in plasma — •Oleksandr Polonskyi, Jonas Drewes, Alexander Vahl, Thomas Strunskus, and Franz Faupel — Chair for Multicomponent Materials, Faculty of Engineering, Kiel University, Germany

The unique properties of nanoparticles (NPs) associated with their dimensions make them very attractive for the growing field of nanotechnology. The methods of their synthesis allowing a simple and reliable tuning of NP dimensions as well as chemical structure are in a high demand. Here, we focus on a plasma based approach for generation of metallic NPs utilizing a magnetron sputtering operating at a relatively high gas pressure (~100 Pa). This method become very attractive for NP generation providing the ability to deposit various types of NPs with good control over size and size distribution. However, the processes during NP formation in plasma are not fully understood yet and require more advanced in-situ methods to follow NP growth. Here we report on the investigation of the initial stages of metallic NP growth in a gas phase by broadband transmission UV-Vis spectroscopy. We demonstrate that due to their strong particle plasmon resonance, small clusters and NPs can be monitored by UV-Vis spectroscopy in-situ during growth and transport. We found that small clusters are already generated in the region close to the magnetron target surface. Our measurements indicate that a high concentration of nanoparticles is located near the magnetron because of trapping in a plasma volume.