Regensburg 2019 – wissenschaftliches Programm
O 47.4: Poster
Dienstag, 2. April 2019, 18:00–20:00, Poster D
Quantitative Kelvin probe force microscopy on nanoscale devices — Amelie Axt1, Ilka M Hermes1, Rüdiger Berger1, and •Stefan A.L. Weber1,2 — 1MPI for Polymer Research Mainz, Germany — 2Institute of Physics, Johannes Gutenberg University Mainz, Germany
We investigate the influence of the operation method in Kelvin probe force microscopy (KPFM) on the measured potential distribution. KPFM is widely used to map the nanoscale potential distribution in operating devices, e.g. in thin film transistors or on cross sections of functional solar cells . Quantitative surface potential measurements are crucial for understanding the operation principles of functional nanostructures in these electronic devices. Nevertheless, KPFM is prone to certain imaging artifacts, such as crosstalk from topography or stray electric fields. Here, we compare different Amplitude Modulation (AM) and Frequency Modulation (FM) KPFM methods on a reference structure with a defined potential difference . In particular, we investigate how quantitative the externally applied voltage is measured. We found that even in the presence of a strong stray field, the FM KPFM methods measured more than 95% of the external bias, whereas the commonly used lift-mode AM KPFM measured less than 70% of the external bias.  Energy Environ. Sci., 2018,11, 2404; J. Phys. Chem. Lett., 2018, 9, 6249.  Beilstein J. Nanotechnol. 2018, 9, 1809.