Regensburg 2019 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 2: Vacuum Metrology

VA 2.1: Hauptvortrag

Montag, 1. April 2019, 09:30–10:10, H6

Vacuum metrology and its impact on research and industry — •Karl Jousten and Matthias Bernien — Physikalisch-Technische Bundesanstalt, Institut Berlin, Abbestr. 2-12, 10587 Berlin

Whenever a physical quantity like vacuum pressure is being measured it is important that the indication of the instrument is in agreement with the International System of Units (SI). Normally, the user does not want to take care of this, but the manufacturers of the instruments and the calibration services need to. The measurement of vacuum covers 15 decades and needs instruments that realize quite different physical effects of pressure or gas density. While the mechanical deformation of membranes or thermal conductivity are used in rough and medium vacuum, the instruments for high and ultra-high vacuum measure the impingement rate of gas molecules or their number density in some volume. Vacuum presents the necessary environment for many research activities and industrial processes, however, just a few applications need high accuracy of the vacuum measurement. Leak rate measurements or outgassing rate measurements have to ensure that components are correctly qualified for their purpose as e.g. cardia pacemakers or components in EUV lithography. In the future, it can be expected that optical methods like laser spectroscopy and refractive index measurements will play a more important role in vacuum measurement.