Regensburg 2019 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 2: Vacuum Metrology

VA 2.3: Vortrag

Montag, 1. April 2019, 10:55–11:25, H6

Vacuum Pressure Measurement in Industrial Environments — •Martin Wüest — INFICON AG, Alte Landstrasse 6, LI-9496 Balzers, Liechtenstein

The theme of this session is "Metrology is the key for your success in research and industry". Indeed poor process control leads to large product tolerances, commonly associated with low product quality. However, the word "metrology" is more often associated with National Measurement Institutes (NMI) than with industrial practice. At NMI we have benign conditions with a clean environment, temperature stability, knowledgeable personnel and plenty of time for a thorough calibration. The industrial world is different. We have seasonal and daily ambient temperature swings, we have vibration, magnetic interference, harsh process chemistries and the like. Time is money; therefore high cadence process steps are favored. To bring the science of measurement to industry is a challenge. Sensors are expected to reliably and reproducibly measure process variables in a non-ideal environment. I will present cases demonstrating what we had to do to make our vacuum gauges better withstand the real industrial world.