Regensburg 2019 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 5: Vacuum Measurement in Technical Applications

VA 5.3: Vortrag

Montag, 1. April 2019, 16:35–17:05, H6

Modern Mass Spectrometry in Vacuum Applications using LEYSPEC RGAs — •Stefan Lausberg — Leybold GmbH, Bonner Str. 498, 50968 Köln, Germany

In vacuum applications it is essential to keep the process or ultimate pressure at a distinct level. For some cases it is sufficient to consider the total pressure. However, in many vacuum applications it is even more important to keep the partial pressure of a certain substance at a distinct threshold. Parts treated in vacuum furnaces are very sensitive to enhanced amounts of oxygen. Optical thin film production requires a low enough partial pressure of water and the absence of hydrocarbons. This is where residual gas analyzers (RGA) come into play.

Here we present the new Leybold RGAs, the so-called LEYSPEC VIEW and LEYSPEC ULTRA. These quadrupole mass spectrometers (QMS) cover a range of atomic masses up to 300 amu. They can be provided suitable for bake-out temperatures of up to 300^∘C and operation temperatures of up to 250^∘C. The all-in-one devices with integrated control and display can be operated even without connecting them to a computer. A programmable degas function is implemented for degassing after start or exposure to atmosphere. For more advanced test procedures Leybold provides an intuitive software that can be used as a process gas monitor. Different amounts of atomic masses can be entered into recipes that can be identified by the RGA. We outline the utilization of LEYSPEC RGAs in different vacuum applications and their integration into turbomolecular pumping systems forming stand-alone devices.