Dresden 2020 – wissenschaftliches Programm
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MM 61.4: Vortrag
Donnerstag, 19. März 2020, 16:30–16:45, IFW D
In-depth porosimetry of pore evolution in low-k thin films — •Ahmed G. Attallah1, Maciej Oskar Liedke1, Nicole Koehler2, Maik Butterling1, Eric Hirschmann1, Stefan E. Schulz2, Ramona Ecke2, and Andreas Wagner1 — 1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Radiation Physics, 01328 Dresden, Germany — 2Center for Microtechnologies, Chemnitz University of Technology, 09126 Chemnitz, Germany
The development of the porous structure in low-k materials after conducting a thermal in-situ and ex-situ curing processes will be shown. Such a study has been performed by using positron annihilation spectroscopies (Lifetime and Doppler Broadening) and Fourier-transform infrared spectroscopy. The goal of this work is to take a closer look at the kinetics of the template removal which, in addition to the chemical structure of the matrix-template mixture, defines the created porosity. Positron lifetime shows that template decomposition starts at 473K and complete removal is accomplished at 723K. Additionally, it reveals template agglomeration and diffusion to the surface by creating channels that would affect the mechanical stability and the k-value. Definite curing temperature ranges for different processes (moisture removal, SiOx network cross-linking, porogen decomposition) has been figured out by Doppler broadening spectroscopy during in-situ curing. Also, it shows a pore interconnectivity onset at 673K. Fourier-transform infrared spectroscopy results help for understanding the network changes during curing and confirmed positron results for template removal.