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P: Fachverband Plasmaphysik

P 8: Low-temperature plasma and applications

P 8.5: Vortrag

Dienstag, 10. März 2020, 15:10–15:25, b302

Improved Analytic Response Function of the Planar Multipole Resonance Probe — •Michael Friedrichs¹, Dennis Pohle², Ilona Rolfes², and Jens Oberrath¹ — ¹Modeling and Simulation, Department of Electric Power Engineering, South Westphalia University of Applied Science, Soest, Germany — ²Institute of Microwave Systems, Department of Electrical Engineering and Information Sciences, Ruhr University Bochum, Bochum, Germany

The planar multipole resonance probe (pMRP), which is mounted inside of the chamber wall, is a specific design of the Active Plasma Resonance Spectroscopy (APRS) and a promising candidate to monitor plasma processes without perturbing them. Based on the cold plasma model an analytic solution of the response function for the ideal pMRP could be derived, which allows to determine the resonance frequency of the probe plasma system. The geometry of the real pMRP is more complicated and requires a numerical model for full 3D electromagnetic simulation in CST. The calculated resonance frequencies of both models are qualitatively in agreement but differ in the exact position. This difference is dominated by the difference in the geometry, which cannot be considered directly in the analytic solution. Thus, a simulation of a more realistic geometry in electrostatic approximation will be presented in Comsol Multiphysics and a numerical adaption of the vacuum excitation in the analytic solution can be implemented in the analytic evaluation of the response function. This allows an improvement of the analytic solution and can be used to derive a more realistic formula for the resonance frequency.