SMuK 2021 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 2: Magnetic Confinement, Plasma-Wall Interaction & Helmholtz Graduate School I
P 2.3: Vortrag
Montag, 30. August 2021, 11:55–12:10, H6
Conventional and non-conventional diagnostics on an atmospheric pressure DC glow microplasma discharge for in situ TEM studies — •Luka Hansen1, Niklas Kohlmann2, Ulrich Schürmann2, Lorenz Kienle2, and Holger Kersten1 — 1Institute of Experimental and Applied Physics, Kiel University, 24098 Kiel, Germany — 2Institute of Materials Science, Kiel University, 24143 Kiel, Germany
Plasma surface interaction is one of the most discussed topics in plasma technology due to its relevance for the production or modification of micro- or even nano-structured surfaces. Still, state of the art analysis is mostly limited to the separation of plasma processing and surface analysis, since observing plasma induced surface changes in real time and nanoscale resolution is challenging. Based on the proof of principle experiments by Tai et al. [1] a DC microplasma discharge cell for in situ TEM integration is developed to overcome this limitation. Prior to introducing the cell close to the sensitive TEM optics extensive testing and diagnostics of the plasma discharge have to be done to ensure stability and reproducibility. Results of the conventional (electrical measurements, optical imaging, and emission spectroscopy) as well as non-conventional (calorimetry) diagnostics will be presented and a report on the current progress of the in situ measurements will be given.
[1] K Tai et al 2013 Scientific Reports 3 1325