Regensburg 2022 – wissenschaftliches Programm
HL 14.5: Vortrag
Dienstag, 6. September 2022, 11:30–11:45, H34
Shift of the absoption onset in corundum-like α-(TixGa1−x)2O3 — •Elias Kluth1, Michael Fay2, Christopher Parmenter3, Joseph Roberts4, Fabien Massabuau5, Rüdiger Goldhahn1, and Martin Feneberg1 — 1Institut für Physik, Otto-von-Guericke-Universität Magdeburg, Germany — 2Advanced Materials Research Group, Faculty of Engineering, University of Nottingham, NG7 2RD, UK — 3Nottingham Nanotechnology and Nanoscience Centre, University of Nottingham, University Park, Nottingham NG7 2RD, UK — 4School of Engineering, The University of Liverpool, Liverpool L69 3GH, UK — 5Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK
Corundum-like α-Ga2O3 is a metastable phase of the polymorphic ultra-wide band gap semiconductor Ga2O3. While previous resarch has mostly focused on the stable β-phase the α-phase is less discussed, but interesing as well as it allows bandgap-engineering by alloying e.g. with α-Al2O3 (sapphire) or In2O3.
Since the transition metal oxide Ti2O3 as well, has a corundum-like phase (α-phase), with a small latice mismatch of about 3.5% to α-Ga2O3, we investigate here (0001) α-Ga2O3 thin films alloyed with Ti, grown by ALD (atomic layer deposition).
We use spectroscopic ellipsometry in ultraviolet range to obtain the complex dielectric function (DF) of α-(TixGa1−x)2O3 up to x=0.61. We find a clear red shift of the absorption onset with increasing Ti content, as well as an increase of the amplitude of the DF.