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SKM 2023 – wissenschaftliches Programm

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CPP: Fachverband Chemische Physik und Polymerphysik

CPP 29: Interfaces and Thin Films

CPP 29.10: Vortrag

Mittwoch, 29. März 2023, 12:15–12:30, MER 02

In situ GISAXS investigation of sputtering IZO thin film for optoelectronic applications — •Huaying Zhong1, Lukas V Spanier1, Christopher R. Everett1, Xinyu Jiang1, Shanshan Yin1, Marlene Sophie Härtel2, Jiahuan Zhang2, Bertwin Bilgrim Otto Seibertz3, Matthias Schwartzkopf4, Stephan V. Roth4,5, and Peter Müller-Buschbaum1,61TUM School of Natural Sciences, Chair for Functional Materials, Garching, Germany — 2HZB, Solar Energy, Berlin, Germany — 3Department of technology for thin-film components, TU Berlin, Berlin, Germany — 4DESY, Hamburg, Germany — 5Department of Fibre and Polymer Technology, KTH, Stockholm, Sweden — 6MLZ, TUM, Garching, Germany

Transparent conducting oxide (TCO) thin films have been studied intensively for optoelectronic devices, such as photodetectors, photovoltaics and light emitting diodes (LEDs). Among the several TCO thin films, zinc doped indium oxide (IZO) has received much attention as interface layer in optoelectronic devices due to its excellent electrical conductivity, optical transmittance, high thermal/chemical stability, low cost and low deposition temperature. Here, ITO glass and spin coated ZnO on ITO glass are used as the templates for IZO thin film deposition via DC magnetron sputtering technique. The growth dynamics of IZO film on these two templates are respectively investigated via grazing small angle x-ray scattering (GISAXS) characterization, and the morphology and optoelectrical properties of final films are further investigated.

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