SKM 2023 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 13: Optical Analysis of Thin Films I
DS 13.2: Vortrag
Donnerstag, 30. März 2023, 10:00–10:15, SCH A 316
Large area functional thin film properties mapping using in-line hyperspectral imaging during roll-to-roll magnetron sputter deposition — Florian Gruber2, Patrick Schlenz1, Steffen Bieder4, Eric Schneider4, Jolanta Szelwicka1, Julio Hernandez3, Christian Sternemann4, and •Steffen Cornelius1 — 1Fraunhofer FEP, Winterbergstrasse 28, 01277 Dresden, Germany — 2Fraunhofer IWS, Winterbergstrasse 28, 01277 Dresden, Germany — 3Norsk Elektro Optikk AS, Ostensjoveien 34, 0667, Oslo, Norway — 4Fakultät Physik/DELTA, Technische Universität Dortmund, August-Schmidt-Straße 1, 44227 Dortmund, Germany
Roll-to-roll (R2R) coating processes of flexible substrates are established for cost-efficient thin film functional materials production for applications like energy efficient windows and solar cells. However, even small variations of thickness and/or composition homogeneity may affect the final product performance. Due to the high throughput of coated surface area in R2R coating the ex-situ material characterization is very time consuming, often destructive and offers no possibility for in-situ process monitoring and/or quality control.
The NanoQI EU-H2020 project develops a powerful in-line technology combining hyperspectral imaging with X-ray reflectivity via a machine learning algorithms, enabling large area (0.5m x 100m) high resolution (<1mm) high speed (m/min) thin film properties imaging. The combinatorial thickness mapping of a binary metal-oxide double layer (thickness up to 120nm) on PET substrate will be discussed in detail - aiming to achieve a thickness accuracy of only a few %.