SKM 2023 – wissenschaftliches Programm
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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 6: Poster
KFM 6.29: Poster
Dienstag, 28. März 2023, 17:00–19:00, P3
X-ray near-edge absorption spectroscopy and X-ray diffraction on thin AlCrVYN films — •Eric Schneider1, Nicola Thiering1, Michael Paulus1, Finn Ontrup2, Nelson Filipe Lopes Dias2, and David Kokalj2 — 1Fakultät Physik/DELTA TU Dortmund, 44221 Dortmund, Deutschland — 2Fakultät Maschinenbau TU Dortmund, Dortmund, Deutschland
In materials science tool coatings are optimized for use at elevated process temperatures. AlCrVYN thin films are promising candidates in this area, as vanadium can form so called Magnéli phases, which reduce the coefficient of friction. The aim of this project is to gain a fundamental understanding of the dependence between deposition parameters, layer structure and oxidation behavior of AlCrVYN coatings. For this purpose, the coating systems were deposited on a WC-Co composite substrate by a hybrid procedure of DC sputtering and high-energy pulse magnetron sputtering (HiPIMS). In addition, different cathode-target combinations will be tested to determine their influence on the structure of the thin films. For the investigation of the samples we used synchrotron radiation at beamline BL9 and BL10 of the synchrotron radiation source DELTA (Dortmund, Germany) to perform XRD and XANES measurements. The samples were annealed ex situ in an oven to temperatures up to 1000°C to study their oxidation behavior. Depending on the process parameters, different oxidation behaviour and residual stresses present in the samples were observed. We thank DELTA for providing synchrotron radiation. This work was supported by the DFG via TO 169/21-1.