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SKM 2023 – wissenschaftliches Programm

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MA: Fachverband Magnetismus

MA 49: Magnetic Information Technology, Recording, Sensing

MA 49.2: Vortrag

Freitag, 31. März 2023, 09:45–10:00, HSZ 403

Improved Planar Hall Effect sensors for fluid measurement techniques — •Jan Schmidtpeter, Thomas Wondrak, Denys Makarov, and Yevhen Zabila — Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Dresden Germany

Inductive flow measurement techniques such as the Contactless Inductive Flow Tomography require sensors that provide a magnetic field resolution of 1 nT while operating in magnetic fields of several mT. With advancements in state-of-the-art magnetoresistive thin-film sensors the required behavior regarding sensitivity, precision and hysteresis can be achieved [1]. Planar Hall Effect sensor have been shown to be one of the leading sensor types in this area. Therefore we present a detailed study on the effect of different sensor layouts, geometries, magnetic flux concentrators and other parameters on the characteristics of single layer Permalloy Planar Hall Effect sensors.

[1] Granell, Pablo Nicolás, et al. npj Flexible Electronics 3.1 (2019): 1-6.

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