SKM 2023 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 49: Magnetic Information Technology, Recording, Sensing
MA 49.5: Vortrag
Freitag, 31. März 2023, 10:45–11:00, HSZ 403
Transfer printing of GMR sensing elements for curved electronics — Bezsmertna Olha1, Rui Xu1, •Eduardo Sergio Oliveros-Mata1, Clemens Voigt2, Sindy Mosch2, Jürgen Fassbender1, Mykola Vinnichenko2, and Denys Makarov1 — 1Helmholtz-Zentrum Dresden-Rossendorf e.V., 01328 Dresden, Germany — 2Fraunhofer Institute for Ceramic Technologies and Systems IKTS, 01277 Dresden, Germany
In the post-covid era, touchless interaction between human beings and environments is attracting more and more attentions. Sensors based on giant magnetoresistance (GMR) effect are widely considered as a workhorse to address this demand. However, the fabrication of GMR multi-layer elements face many limitations (e.g., inappropriate to substrates with curved and/or rough surfaces) due to the layer thickness dependence of performance. Here, we propose a transfer technique to overcome the aforementioned limitations. With the assistance of two sacrificial layers, a large scale and wrinkle-free coverage is realized on various substrates (of different materials, roughness, and curvatures) with little loss of GMR performance. Notably, such technique is easy processing, without the need of any substrate deformation, temporary carriers or high-temperature processing. The transferred sensors are integrated into skin-mountable electronics, successfully functioning as a human-machine interface.