SKM 2023 – scientific programme

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O: Fachverband Oberflächenphysik

O 24: Poster: Ion Beam Interaction with Surfaces and Interfaces

O 24.3: Poster

Monday, March 27, 2023, 18:00–20:00, P2/EG

In situ GISAXS observation of ion-induced nanoscale pattern formation on crystalline Ge(001) in the reverse epitaxy regime — •Denise Erb¹, Peco Myint^2,3, Kenneth Evans-Lutherodt⁴, Karl Ludwig^4,5, and Stefan Facsko¹ — ¹Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Germany — ²Division of Materials Science and Engineering, Boston University, USA — ³X-ray Science Division, Argonne National Laboratory, USA — ⁴National Synchrotron Light Source II, Brookhaven National Laboratory, USA — ⁵Department of Physics, Boston University, USA

The ion-induced nanoscale pattern formation on a crystalline Ge(001) surface is observed in situ by means of grazing incidence small angle x-ray scattering (GISAXS). Analysis of the GISAXS intensity maps yields the temporal development of geometric parameters characterizing the changing pattern morphology. In comparison with theoretical predictions and with simulations of the patterning process based on a continuum equation we find good agreement for the temporal evolution of the polar facet angle, characteristic length, and surface roughness in the nonlinear regime. To achieve this agreement, we included an additional term in the continuum equation which adjusts the pattern anisotropy.